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IncreasingtheetchrateoftheSTIdielectricresultedinatendencytocauseSTIdivotsandincreaseddivotsize....STIdivotformationinaccordancewiththe ...,2013年7月17日—IntheSTItechnique,atrenchsurroundingasemiconductordevicesuchasatransistorisetchedintoasemico...
Method of reducing STI divot formation during ...
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STIdivotformationiseliminatedorsubstantiallyreducedbyemployingaverythinnitridepolishstoplayer,e.g.,nothickerthan400Å.Theverythin ...
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